论文名称
A High-precision Absolute Angular Displacement Capacitive Sensor Using Three-stage Time-Grating in Conjunction with a Re-modulation Scheme
关键词
Absolute rotary sensor,capacitive sensor,angular displacement measurement
论文作者
[外]Zhicheng Yu;[外]Kai Peng;[外]Xiaokang Liu;[外]Ziran Chen;黄垚