论文

论文名称
Experimental Study on Non-linear Calibration of Two-dimensional Nano-positioning StagePhase Measurement Performance Evaluation of Differential Sampling System
关键词
metrology,nano stages,nonlinear calibration, laser interferometer measurementDifferential sampling system,phase measurement,PJVS
发布刊物
外文期刊外文会议
发布刊物或会议
10th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI 2018)CPEM 2018
收录情况
EI
申请部门
纳米新材料计量研究所电磁计量科学研究所
论文作者
[外]周奇;李琪;施玉书贾正森;[外]刘志尧;李博