Division of Metrology in Length and Precision Engineering

UTC(NIM)

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Address: No.18,Bei San Huan
Dong Lu,Chaoyang
Dist,Beijing,P.R.China, 100013

ws@nim.ac.cn
Tel:+86-10-64525678

 

A High Precision Two-dimensional Laser Standard System Was Developed

 

A new, high precision two-dimensional laser standard instrument with an original design and technical property right is successfully developed to solve distance measurement and calibration problems for precision photomasks, 2D standards, small line scale, based on point to point and line to line in the range of 350mm. Its measurement uncertainty is within 0.1μm~0.3μm, k=2. This instrument can be used for precision calibration and traceability for photo masks, two-dimension standards, coding masks, and micro reticle rulers, overcomes the domestic calibration and Traceability technical problem, fills the domestic gap, and reaches the international advanced technical index.

 

high precision two-dimensional laser standard system