The project is supported by Nonprofit Industry-specific Project organized by Ministry of Finance....

Start Date

2007

End Date

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Address: No.18,Bei San Huan
Dong Lu,Chaoyang
Dist,Beijing,P.R.China, 100013

ws@nim.ac.cn
Tel:+86-10-64525678

Study of Large-Range Nano-Geometry Measurement Standard

 

The project is supported by Nonprofit Industry-specific Project organized by Ministry of Finance. The aim is to develop a nano-geometry measurement standard within a measurement range of 50×50×2mm3. The standard is established to serve for semiconductor industry and MEMS development through tracing dimension measurement to the SI unit.

 

With development of nanoscience, the need for high accuracy metrological atomic force microscopes (AFMs) is increasing rapidly in industrial field including characterization of nanostructure and quality control. Currently, AFMs usually have a limited scanning range, thus cannot satisfy the need of semiconductor industry development for large range metrological AFMs. Several national metrological institutes began to develop AFMs, which possess metrological ability, to be a standard. The aim of the project is to develop a nano-geometry measurement standard within a range of 50×50×2mm3 measurement range. The standard is established tracing the dimension measurement to SI unit with multi-pass interferometers. The measured uncertainty is 20 nm (k=1) in the 50×50×2mm3 measurement range.