Start Date

2011

End Date

2015

Staff

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Address: No.18,Bei San Huan
Dong Lu,Chaoyang
Dist,Beijing,P.R.China, 100013

ws@nim.ac.cn
Tel:+86-10-64525678

 

Study of UV 2D Structural Measurement Standard and Reference Material

Line-width reduction in semiconductor industry requires high resolution measurement. The project task is to establish a measurement standard with 248 nm wavelength UV light to improve the lateral resolution of the microscopy. The dimension will be traced to Si unit with interferometers. 

 

Designed uncertainty of the standard is 20 nm in 0.3~50 mm measurement range.