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Contact Us

General Information:

Address: No.18,Bei San Huan
Dong Lu,Chaoyang
Dist,Beijing,P.R.China, 100013

ws@nim.ac.cn
Tel:+86-10-64525678

 

Overview

 

Nano-scale Measurements cover 9 projects in 4 areas, collaborated with partners

 

Dimensional (conducted by Division of Metrology in Length): 

248 nm DUV 2D Microscope, Metrological SEM, CD AFM, CRMs of Linewidth

 

Chemical (conducted by Division of Chemical Metrology and Analytical Science):

CRMs of Carbon Nanotubes & Nanoparticles (<100nm),   CRMs of Specific Surface Area, CRMs for Surface Analysis, Evaluation of the Biological Effects of Carbon  Nanotube

 

Mechanic (conducted by Division of Mechanics and Acoustics):  

E1 Class Weights in μg range, Micro&Nano Force Standard

 

 Micro&Nano device fabrication (conducted by Division of Nano Merology and Materials Measurement):

Quantum Hall resistance devices, Josephson voltage junction array