The project is supported by Nonprofit Industry-specific Project organized by Ministry of Finance. The aim is to develop a nano-geometry measurement standard within a measurement range of 50×50×2mm3. The standard is established to serve for...
Division of Nano Merology and Materials Measurement
Division of Nano Merology and Materials Measurement
Overview
The aim of the Laboratory is to develop and improve national standards and calibration service abilities for nanopahse materials. The research of the laboratory are mainly focused on micro-nano scale dimensional metrology, surface texture metrology and micro/nano coordinate measurement.
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Study of UV 2D Structural Measurement Standard and Reference Material
Line-width reduction in semiconductor industry requires high resolution measurement. The project task is to establish a...
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Establishment of Metrological SEM and Dual-probe Metrological SPM
The project will establish a metrological SEM by tracing measured dimension values to SI unit. The SEM is modified through combination of interferometers and nanostage.The standard will provide an...
International Cooperation
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Mr Shi and Li attended the 20th IMEKO World Congress held on 9-14, Sep, 2012, Busan, and introduced the development of metrological AFM.
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International cooperation project between NIM and DTU MEK in surface roughness measurement was proposed.
National Measurement Standards and CMCs
Services
Staff
- 86-(0)10-64524908 Lu Mingzhen
- Head of Lab, Associated Research Fellow
- lumzh@nim.ac.cn
Contact Us
Lu Mingzhen, Head of Lab
Add: No.18,Bei San Huan
Dong Lu,Chaoyang Dist,
Beijing,P.R.China, 100013
Email: lumzh@nim.ac.cn
Tel: 86-(0)10-64524908