Ten kinds of polystyrene particle size CRMs have been developed with nominal values from 60nm to ...

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Development of Particle Size CRMs

Ten kinds of polystyrene particle size CRMs have been developed with nominal values from 60nm to 1000nm, which were determined by SEM and TEM methods. In the determination process of SEM method, two kinds of micrometers with nominal values of 400nm and 1000nm, whose certified result can be traceable to national length primary standard with an uncertainty of 0.2nm (k=2), were used to calibrate magnification of SEM.

 

 

Code

 GBW

Nominal Value /nm

Certified Value /nm

Uncertainty /nm k=2

Standard deviation of size distribution

12017

1000nm

1294

10

1.4%

(E)120086

800nm

776.2

6.5

2.2%

(E)120087

700nm

709.3

5.9

2.9%

12031

500nm

487.2

4.1

1.4%

(E)120088

400nm

424.5

3.8

1.8%

12018

300nm

280.3

2.6

1.5%

(E)120089

200nm

209.1

3.2

1.3%

12019

100nm

115.1

1.2

2.5%

(E)120090

80nm

84.0

1.9

4.2%

(E)120091

70nm

65.2

1.5

5.3%