Ten kinds of polystyrene particle size CRMs have been developed with nominal values from 60nm to ...

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Development of Particle Size CRMs

Ten kinds of polystyrene particle size CRMs have been developed with nominal values from 60nm to 1000nm, which were determined by SEM and TEM methods. In the determination process of SEM method, two kinds of micrometers with nominal values of 400nm and 1000nm, whose certified result can be traceable to national length primary standard with an uncertainty of 0.2nm (k=2), were used to calibrate magnification of SEM.

 

 

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 GBW

Nominal Value /nm